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TOKYO ELECTRON LIMITED
- Wins
- 3
- Total value
- S$13.8M
- Median value
- S$3.5M
- First / last win
- 29 Nov 2022 – 18 Sept 2025
Agencies served
- Agency for Science, Technology and Research3
Award history
| Date | Description | Agency | Amount |
|---|---|---|---|
| 18 Sept 2025 | Provision of One (1) Unit of 12 inch Lithography Track System | Agency for Science, Technology and Research | S$7,637,250 |
| 24 Jun 2024 | Provision of One (1) Unit of 6'' and 8'' E-Beam Lithography Track System. | Agency for Science, Technology and Research | S$3,484,728 |
| 29 Nov 2022 | This is an Open tender for the Supply, Delivery, Installation, Testing and Commissioning of a new/refurbished Photolithography Track System. The system will be utilised to coat and develop photosensitive material of 248nm wavelength forming critical dimension of minimum resolution of 150nm, to enhance current technical capabilities and improve the reliability of wafer processing for 8- inch SAM (Sensors, Actuators & Microsystems) and SiC (Silicon Carbide) process in IME. | Agency for Science, Technology and Research | S$2,673,132 |