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Plasma-Therm LLC
- Wins
- 3
- Total value
- S$7.2M
- Median value
- S$1.9M
- First / last win
- 8 Sept 2023 – 15 Feb 2024
Agencies served
- Agency for Science, Technology and Research3
Award history
| Date | Description | Agency | Amount |
|---|---|---|---|
| 15 Feb 2024 | Provision of One (1) Unit of Etcher to be used for Silicon Nitride (SiNx) etch and Photo Resist (PR) Descum Process | Agency for Science, Technology and Research | S$1,861,918 |
| 2 Jan 2024 | Provision of One (1) unit of Non-Metal Rapid Thermal Spike Annealing (RTA), One (1) unit of Metal RTA and One (1) unit of Metal RTA (Gold) | Agency for Science, Technology and Research | S$3,559,617 |
| 8 Sept 2023 | Provision of One (1) Unit of Plasma Enhanced Chemical Vapor Deposition (PECVD) System for Back End of Line (BEOL) applications | Agency for Science, Technology and Research | S$1,744,471 |